This document specifies methods for the chemical analysis of metal impurities present in silicon dioxide powders as fine ceramics using inductively coupled plasma-mass spectrometery (ICP-MS). It stipulates the methods for the determination of metal impurities in silicon dioxides powders. Silicon dioxide powders are decomposed by acid decomposition. The aluminium, calcium, cadmium, chromium, copper, iron, lead, lithium, magnesium, manganese, nickel, potassium, sodium, titanium, zinc, and zirconium contents in the test solution are determined by ICP-MS.